Ultrasonic Linear Motor with a High Stiffness Support Mechanism for Precision Control

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New holding mechanism is proposed to improve the positioning capability of ultrasonic linear motor based on previous researches proposed by the authors. Through the previous holding mechanism using a resonance system, the remarkable operating stability and controllability at high-power driving were achieved. However, when higher power is demanded, big noise in supporting parts of a resonance system is generated and these parts could be damaged and worn due to the discordance of a resonance frequency between a transducer and supporting horns. Also the coupling problem of two vibration modes remains because of using a half wavelength. This research proposes a new design of ultrasonic motor with three supporting points in one vibrator for high stiffness support and discusses the solution about the coupling effect and the nano-level positioning capability. Finally, a maximum driving mechanical force and the positioning accuracy were achieved over 75 N and 100 nm through this mechanism. Moreover, the efficiency of motor was 35% when the trust force was 52 N and the velocity was 0.27 m/s.

Info:

Periodical:

Key Engineering Materials (Volumes 368-372)

Edited by:

Wei Pan and Jianghong Gong

Pages:

204-207

Citation:

C. H. Yun et al., "Ultrasonic Linear Motor with a High Stiffness Support Mechanism for Precision Control", Key Engineering Materials, Vols. 368-372, pp. 204-207, 2008

Online since:

February 2008

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$38.00

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