Ultrasonic Linear Motor with a High Stiffness Support Mechanism for Precision Control

Cheol Ho Yun; Wan Soo Kim; Hyun Rok Cha; Tea Uk Jung; Sun Kyu Lee

doi:10.4028/www.scientific.net/KEM.368-372.204

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Accurate FEM/BEM Simulation of Wireless Passive Surface Acoustic Wave Sensors
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A Micro Piezoelectric Motor with a Disk-Pivot Structure
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Ultrasonic Linear Motor with a High Stiffness Support Mechanism for Precision Control
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A Novel Piezoelectric Micro-Motor Using Multilayer Co-Firing Piezoelectric Ceramics
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A Considering Method of Density Distribution Factor for the Ceramic Motor with Soft Magnetic Composite Core
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Finite Element Analysis and Design of Monolithic Multilayer Piezoelectric Micromanipulator
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 368-372Ultrasonic Linear Motor with a High Stiffness...

Ultrasonic Linear Motor with a High Stiffness Support Mechanism for Precision Control

Abstract:

New holding mechanism is proposed to improve the positioning capability of ultrasonic linear motor based on previous researches proposed by the authors. Through the previous holding mechanism using a resonance system, the remarkable operating stability and controllability at high-power driving were achieved. However, when higher power is demanded, big noise in supporting parts of a resonance system is generated and these parts could be damaged and worn due to the discordance of a resonance frequency between a transducer and supporting horns. Also the coupling problem of two vibration modes remains because of using a half wavelength. This research proposes a new design of ultrasonic motor with three supporting points in one vibrator for high stiffness support and discusses the solution about the coupling effect and the nano-level positioning capability. Finally, a maximum driving mechanical force and the positioning accuracy were achieved over 75 N and 100 nm through this mechanism. Moreover, the efficiency of motor was 35% when the trust force was 52 N and the velocity was 0.27 m/s.