Ultrasonic Linear Motor with a High Stiffness Support Mechanism for Precision Control
New holding mechanism is proposed to improve the positioning capability of ultrasonic linear motor based on previous researches proposed by the authors. Through the previous holding mechanism using a resonance system, the remarkable operating stability and controllability at high-power driving were achieved. However, when higher power is demanded, big noise in supporting parts of a resonance system is generated and these parts could be damaged and worn due to the discordance of a resonance frequency between a transducer and supporting horns. Also the coupling problem of two vibration modes remains because of using a half wavelength. This research proposes a new design of ultrasonic motor with three supporting points in one vibrator for high stiffness support and discusses the solution about the coupling effect and the nano-level positioning capability. Finally, a maximum driving mechanical force and the positioning accuracy were achieved over 75 N and 100 nm through this mechanism. Moreover, the efficiency of motor was 35% when the trust force was 52 N and the velocity was 0.27 m/s.
Wei Pan and Jianghong Gong
C. H. Yun et al., "Ultrasonic Linear Motor with a High Stiffness Support Mechanism for Precision Control", Key Engineering Materials, Vols. 368-372, pp. 204-207, 2008