Fundamental Study on High-Frequency Ultrasound Probes Fabricated by Aerosol Deposition Method and Hydrothermal Method

Akito Endo; Jun Akedo; Shinichi Takeuchi

doi:10.4028/www.scientific.net/KEM.388.159

Paper Titles

Patterning of HfO₂ Thin Films Using Chemical Solution and Dielectric Properties
p.141

Adsorption Property of Dye Molecule over Semi-Crystalline Mesoporous Titania Films
p.145

Crystallization Behavior of BaO-TiO₂-GeO₂ Glass Thin Film
p.149

Fabrication of Triboluminescent Film on Inconel 600 Substrate by RF Magnetron Sputtering Method
p.153

Fundamental Study on High-Frequency Ultrasound Probes Fabricated by Aerosol Deposition Method and Hydrothermal Method
p.159

Physical and Electrical Properties of (Ba_0.6,Sr_0.4)TiO₃ Ferroelectric Thick Films Prepared by Aerosol Deposition Technique
p.163

Influence of Hydrogen Atoms on Electrical Properties of BST Thin Film Capacitors
p.167

Effect of Gel-Films-Thickness and Sintering Conditions on the Crystal Structure and Microstructure of Alkoxy-Derived BaTiO₃ Thin Films
p.171

Effect of the Annealing Temperature on Dielectric Properties of Bi_1.5Zn_1.0Nb_1.5O₇ Films Prepared by MOCVD
p.175

HomeKey Engineering MaterialsKey Engineering Materials Vol. 388Fundamental Study on High-Frequency Ultrasound...

Fundamental Study on High-Frequency Ultrasound Probes Fabricated by Aerosol Deposition Method and Hydrothermal Method

Abstract:

The ultrasound probes utilized in this study were fabricated using lead zirconium titanate (PZT), which was deposited using two different methods—the aerosol deposition (AD) method and the hydrothermal method. The fabricated ultrasound probes had the same structure wherein an electrode and an acoustic backing block were attached to each transducer. In this study, we have compared the acoustic characteristics of a high-frequency ultrasound probe fabricated by the AD method with those of a probe fabricated using the hydrothermal method; further, we have studied and hence determined the optimal process that can be used in the fabrication of high-frequency ultrasound probes with a resonance frequency of 40 MHz. As a result, when the pickup voltage was compared, the ultrasound probes fabricated by the AD method exhibited a value 9.5 times higher than that of the probes fabricated by the hydrothermal method. Moreover, the ultrasound probes fabricated by the AD method were found to transmit pulses at resonance frequencies of 28 MHz, 45–50 MHz, and 82–88 MHz.