Effect of Gel-Films-Thickness and Sintering Conditions on the Crystal Structure and Microstructure of Alkoxy-Derived BaTiO3 Thin Films

Kiyotaka Tanaka; Kazuyuki Suzuki; Kazumi Kato

doi:10.4028/www.scientific.net/KEM.388.171

Paper Titles

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Physical and Electrical Properties of (Ba_0.6,Sr_0.4)TiO₃ Ferroelectric Thick Films Prepared by Aerosol Deposition Technique
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Influence of Hydrogen Atoms on Electrical Properties of BST Thin Film Capacitors
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Effect of Gel-Films-Thickness and Sintering Conditions on the Crystal Structure and Microstructure of Alkoxy-Derived BaTiO₃ Thin Films
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Effect of the Annealing Temperature on Dielectric Properties of Bi_1.5Zn_1.0Nb_1.5O₇ Films Prepared by MOCVD
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Analysis of Nonlinear Dielectric Characteristics of (Ba, Sr)TiO₃ Thin Films and their Frequency Conversion Application
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Preparation of MBi₄Ti₄O₁₅ (M=Ba,Ca) Thick Films by Screen Printing
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Effect of Gel-Films-Thickness and Sintering Conditions on the Crystal Structure and Microstructure of Alkoxy-Derived BaTiO₃ Thin Films

Abstract:

Various BaTiO3 thin films were fabricated at 650oC by using different conditions such as the heating rate and alkoxy-derived gel-film thickness. In this study, the spin-coating and calcination step were repeated several times to control the gel-films thickness. And then the one-sintering was carried out with various heating rates. BaTiO3 films with perovskite phase were obtained by using the heating rate of 100oC/sec and the surface morphology became rough with increase of gel-film thickness. We considered that the change of root mean square (rms) roughness and cross-sectional profiles by various heating rates was caused by densification.