Effect of Gel-Films-Thickness and Sintering Conditions on the Crystal Structure and Microstructure of Alkoxy-Derived BaTiO3 Thin Films
Various BaTiO3 thin films were fabricated at 650oC by using different conditions such as the heating rate and alkoxy-derived gel-film thickness. In this study, the spin-coating and calcination step were repeated several times to control the gel-films thickness. And then the one-sintering was carried out with various heating rates. BaTiO3 films with perovskite phase were obtained by using the heating rate of 100oC/sec and the surface morphology became rough with increase of gel-film thickness. We considered that the change of root mean square (rms) roughness and cross-sectional profiles by various heating rates was caused by densification.
Kazumi Kato, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
K. Tanaka et al., "Effect of Gel-Films-Thickness and Sintering Conditions on the Crystal Structure and Microstructure of Alkoxy-Derived BaTiO3 Thin Films", Key Engineering Materials, Vol. 388, pp. 171-174, 2009