Preparation of Epitaxial LiNbO₃ Thin Film by MOCVD and its Properties

Abstract:

Lithium niobate (LiNbO3) thin films were deposited on Al2O3(001) substrates using metal-organic chemical vapor deposition (MOCVD), with Li(dpm) and Nb(C2H5)5 as precursors. By optimizing the conditions of thin film deposition, the c-axis oriented and epitaxially grown LiNbO3 thin films with stoichiometric composition were deposited on an Al2O3(001) substrate. The refractive index of the stoichiometric LiNbO3 thin film was 2.24 at = 632.8 nm, which is close to that of bulk crystal.

• Periodical: Key Engineering Materials (Volume 388)
• Pages: 179-182
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.388.179
• Online since: September 2008
• Authors: Rintarou Morohashi, Naoki Wakiya, Takanori Kiguchi, Tomohiko Yoshioka, M. Tanaka, Kazuo Shinozaki
• Keywords: Epitaxial Film, LiNbO₃, MOCVD, Optical Property, Refractive Index, Thin Film

References

[1] D. X. Lu, E .M. Wong, E .Y. Pun and P. S. Chung, Proceedings of SPIE - The International Society for Optical Engineering, 2897 (1999) p.361.

[2] M. Takahashi, K. Yamauchi, T. Yagi, A. Nishiwaki, K. Wakita, N. Ohnishi, K. Hotta and I. Sahashi, Thin Solid Films, 458 (2004) p.108.

DOI: 10.1016/j.tsf.2003.12.066

[3] K. Shiratsuyu, A. Sakurai, K. Tanaka and Y. Sakabe, Jpn. J. Appl. Phys., 38 (1999) p.5437.

[4] G. H. Lee, B. C. Shin and B. H. Min, Materials Science and Engineering, B95 (2002) p.137.

[5] B. M. Park, K. Kitamura, K. Terabe, Y. Furukawa and E. Suzuki, Philosophical Magazine Letters, 77.

[1] (1998) p.17.

[6] U. Schlarb and K. Betzler, Physical Review B, 50 (2) (1994) p.751.

[7] C. N. Afonso, J. Gonzalo, F. Vega, E. Dieguez, J. C. Wong, C. Ortega, J. Siejka and G. Amsel, Appl. Phys. Lett, 66 [12] (1995).

DOI: 10.1063/1.113651

[2] 15.

[2] 20.

[2] 25.

[2] 30.

[2] 35 10 12 14 16 18 20 22 Refractive index n 0 Nb(OC2H5)5 vaporization pressure/kPa LiNbO3 single crystal λ=632. 8nm.

[1] 8.

[2] 0.

[2] 2.

[2] 4.

[2] 6.

[2] 8.

42 0. 44 0. 46 0. 48 0. 50 0. 52 0. 54 0. 56 present data single crystal[6] PLD at Oxygen ambient[7] PLD at Vacuum[7] Refractive index n 0 Li/(Li+Nb).