Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition
To retain the driving properties of metal-based micro optical scanner derived by aerosol deposition (AD) technique, CO2 laser irradiation was used to anneal the PZT films deposited onto the stainless-steel substrate. Stainless-steel mirror and frame of the scanner with the film annealed by laser irradiation maintained their metallic luster. The scanner with the film annealed by laser irradiation at 600 °C for 1 min has a scanning angle over 30 degree that is comparable with the scanning angle of a similar scanner annealed by electric furnace at 600 °C for 10 min.
Kazumi Kato, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
S. Baba et al., "Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition", Key Engineering Materials, Vol. 388, pp. 195-198, 2009