Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition

So Baba; Jae Hyuk Park; Harumichi Sato; Shizuka Nakano; Kiwamu Ashida; Jun Akedo

doi:10.4028/www.scientific.net/KEM.388.195

Paper Titles

Preparation of Epitaxial LiNbO₃ Thin Film by MOCVD and its Properties
p.179

Analysis of Nonlinear Dielectric Characteristics of (Ba, Sr)TiO₃ Thin Films and their Frequency Conversion Application
p.183

Preparation of MBi₄Ti₄O₁₅ (M=Ba,Ca) Thick Films by Screen Printing
p.187

Preparation of (Ba, Sr)TiO₃ Thin Films on Glazed Alumina Substrate and Analysis of their Electric Properties
p.191

Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition
p.195

Changes in the Electrical Conduction Mechanism with the Electrical Degradation of BaTiO₃-Based Ceramics
p.201

Grain-Orientation Control of Bi₅FeTi₃O₁₅ Ceramics Prepared by Magnetic-Field-Assisted Electrophoretic Deposition Method
p.205

Effect of Template Particle Formation on Texture Development in Bi_0.5Na_0.5TiO₃ Ceramics
p.209

Growth Condition and Ferroelectric Property of Mn-Doped Na_0.5K_0.5NbO₃ Crystal
p.213

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Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition

Abstract:

To retain the driving properties of metal-based micro optical scanner derived by aerosol deposition (AD) technique, CO2 laser irradiation was used to anneal the PZT films deposited onto the stainless-steel substrate. Stainless-steel mirror and frame of the scanner with the film annealed by laser irradiation maintained their metallic luster. The scanner with the film annealed by laser irradiation at 600 °C for 1 min has a scanning angle over 30 degree that is comparable with the scanning angle of a similar scanner annealed by electric furnace at 600 °C for 10 min.