Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition

Abstract:

Article Preview

To retain the driving properties of metal-based micro optical scanner derived by aerosol deposition (AD) technique, CO2 laser irradiation was used to anneal the PZT films deposited onto the stainless-steel substrate. Stainless-steel mirror and frame of the scanner with the film annealed by laser irradiation maintained their metallic luster. The scanner with the film annealed by laser irradiation at 600 °C for 1 min has a scanning angle over 30 degree that is comparable with the scanning angle of a similar scanner annealed by electric furnace at 600 °C for 10 min.

Info:

Periodical:

Edited by:

Kazumi Kato, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki

Pages:

195-198

DOI:

10.4028/www.scientific.net/KEM.388.195

Citation:

S. Baba et al., "Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition", Key Engineering Materials, Vol. 388, pp. 195-198, 2009

Online since:

September 2008

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.