Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition

Abstract:

Article Preview

To retain the driving properties of metal-based micro optical scanner derived by aerosol deposition (AD) technique, CO2 laser irradiation was used to anneal the PZT films deposited onto the stainless-steel substrate. Stainless-steel mirror and frame of the scanner with the film annealed by laser irradiation maintained their metallic luster. The scanner with the film annealed by laser irradiation at 600 °C for 1 min has a scanning angle over 30 degree that is comparable with the scanning angle of a similar scanner annealed by electric furnace at 600 °C for 10 min.

Info:

Periodical:

Edited by:

Kazumi Kato, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki

Pages:

195-198

DOI:

10.4028/www.scientific.net/KEM.388.195

Citation:

S. Baba et al., "Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition", Key Engineering Materials, Vol. 388, pp. 195-198, 2009

Online since:

September 2008

Export:

Price:

$38.00

[1] J. Akedo and M. Lebedev, Jpn. J. Appl. Phys., 38 (1999), p.5397.

[2] J. Akedo and M. Lebedev, Appl. Phys. Lett., 77 (2000), p.1710.

[3] J. Akedo and M. Lebedev, J. Cryst. Growth, 235 (2002), p.415.

[4] S. Baba, H. Tsuda and J. Akedo, IEEE Trans. Ultrason. Ferroele. Freq. Control, (accepted).

[5] S. Baba and J. Akedo, J. Am. Ceram. Soc., 88 (2005), p.1407.

[6] J. Akedo, M. Lebedev, H. Sato and J-H Park, Jpn. J. Appl. Phys., 44 (2005), p.7072.

[7] K. Ashida, M. Levedev, H. Sato, S. Baba, S. Nakano and J. Akedo, Proc. of the 5th Manufacturing & Machine Tool Conference, 5 (2004).

In order to see related information, you need to Login.