Zinc Self-Diffusion in Isotopic Heterostructured Zinc Oxide Thin Films

Abstract:

Zinc isotopic heterostructured zinc oxide thin films of 64ZnO/68ZnO/64ZnO were synthesized using pulsed laser deposition. The pulsed laser was first irradiated onto a polycrystalline target of 64ZnO to deposit the 64ZnO layer, then onto the 68ZnO target to prepare the 68ZnO layer and finally, the 64ZnO target was used again. The 64ZnO/68ZnO/64ZnO layered thin film was thus obtained. The thin films were annealed at various diffusion annealing temperatures. Diffusion profiles of the zinc isotopes due to the annealing were evaluated using secondary ion mass spectrometry (SIMS). The diffusion coefficients were slightly higher near the interface between the thin film and the substrate (the inner region) compared to the near surface (the outer region).

• Periodical: Key Engineering Materials (Volumes 421-422)
• Pages: 193-196
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.421-422.193
• Online since: December 2009
• Authors: Kenji Matsumoto, Yutaka Adachi, Takeshi Ohgaki, Isao Sakaguchi, Tsubasa Nakagawa, Naoki Ohashi, Hajime Haneda
• Keywords: Diffusion, Heterostructure, Isotope, SIMS, Thin Film, Zinc, Zinc Oxide (ZnO)

References

[1] N. Ohashi, K. Kataoka, T. Ohgaki, I. Sakaguchi, H. Haneda, K. Kitamura, M. Fujimoto, Jpn J. Appl. Phys., 46 (2007), p. L1042.

DOI: 10.1143/jjap.46.l1042

[2] A. Tsukazaki, A. Ohtomo, T. Onuma, M. Ohtani, T. Makino, M. Sumiya, K. Ohtani, S.F. Chichibu, S. Fuke, Y. Segawa, H. Ohno, H. Koinuma, M. Kawasaki, Nature Materials, 4 (2005), p.42.

DOI: 10.1038/nmat1284

[3] M. Liu, H. K. Kim, Appl. Phys. Lett., 84 (2005), p.173.

[4] T. Mitsuyu, S. Ono, K. Wasa, J. Appl. Phys., 51 (1980), p.2464.

[5] J. Zhu, Y. Chen, G. Saraf, N. W. Emanetoglu, Y. Lu, Appl. Phys. Lett., 89 (2006), p.103513.

[6] T. Shiosaki, S. Fukuda, K. Sakai, H. Kuroda, A. Kawabata, Jpn J. Appl. Phys., 19 (1980), p.2391.

[7] R. G. Heideman, P. V. Lambeck, J. G. E. Gardeniers, Opt. Mater., 4 (1995), p.741.

[8] L. A. Kappers, O. R. Gilliam, S. M. Evans, L. E. Halliburton, N. C. Giles, Nucl. Instr. Meth. Phys. Res. B, 266 (2008), p.2953.

[9] A. Zubiaga, F. Plazaola, J. A. García, F. Tuomisto, Phys. Rev. B, 76 (2007), p.085202.

[10] H. Ryoken, Defect structure in ZnO thin films prepared by the pulsed laser deposition method., Ph.D. Dissertation, Kyushu University, Kyushu, Japan, (2007).

[11] D. J. Hallwig, Ph.D. Dissertation, University of Erlangen-Nürnberg, Erlangen, Germany, (1979).

[12] Y. Adachi, H. Ryouken, I. Sakaguchi, N. Ohashi, H. Haneda, T. Takenaka, Key Engn. Mat., 248 (2003), p.83.

[13] H. Haneda, J. Ceram. Soc. Jpn., 111 (2003), 439-447.

[14] J. Crank, in The Mathematics of Diffusion, pp.14-15, (Oxford Univ. Press, Second Ed. 1975).

[15] G. W. Tomlins, J. L. Routbort, T. O. Mason, J. Appl. Phys., 87 (2000), p.117.

[16] A. Janotti,C. G. Van de Walle, Phys. Rev. B, B 76 (2007), p.165202.