Behavior of Hydrogen Atoms in Perovskite-Type Oxide Thin Films under Electric Fields

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Abstract:

The behavior of hydrogen in (Ba,Sr)TiO3 (BST) thin film capacitors under electric fields was investigated by performing secondary ion mass spectroscopy (SIMS) analyses. It was clearly observed that the ingress of atmospheric hydrogen into BST thin film capacitors occurred through the anode and that it diffused toward the cathode under electric fields. In addition, it was found that the deterioration of the I-V properties of the BST thin film capacitors can be interpreted in terms of the distribution of hydrogen concentration in the BST thin films.

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Key Engineering Materials (Volumes 421-422)

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281-284

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December 2009

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© 2010 Trans Tech Publications Ltd. All Rights Reserved

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