Analysis and Test of An Optical Scanner Actuated by PZT Films

Song Mei Yuan; Wei Dong Liu; Chi Zhuang

doi:10.4028/www.scientific.net/KEM.434-435.426

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 434-435Analysis and Test of An Optical Scanner Actuated...

Analysis and Test of An Optical Scanner Actuated by PZT Films

Abstract:

The structure and principle of an optical scanner actuated by PZT films have been presented in this paper. FEA software (ANSYS9.0) has been used to analyze the modal and harmonic characteristics of the scanner to acquire its dynamic characteristic and deformation, on which we base to optimize its structure. Finally, its resonance frequency and displacement were measured through experiment to testify its feasibility. It shows that the piezoelectric scanner can realize two-dimensional scanning at high frequency, and it can be fabricated conveniently because of its simple structure.

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Periodical:

Key Engineering Materials (Volumes 434-435)

Pages:

426-428

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.434-435.426

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Online since:

March 2010

Authors:

Song Mei Yuan, Wei Dong Liu, Chi Zhuang

Keywords:

Finite Element Analysis (FEA), PZT Film, Two-Dimensional Piezoelectric Scanner

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References

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