Analysis and Test of An Optical Scanner Actuated by PZT Films
The structure and principle of an optical scanner actuated by PZT films have been presented in this paper. FEA software (ANSYS9.0) has been used to analyze the modal and harmonic characteristics of the scanner to acquire its dynamic characteristic and deformation, on which we base to optimize its structure. Finally, its resonance frequency and displacement were measured through experiment to testify its feasibility. It shows that the piezoelectric scanner can realize two-dimensional scanning at high frequency, and it can be fabricated conveniently because of its simple structure.
Wei Pan and Jianghong Gong
S. M. Yuan et al., "Analysis and Test of An Optical Scanner Actuated by PZT Films", Key Engineering Materials, Vols. 434-435, pp. 426-428, 2010