Properties of Nanosize Aluminum Nitride Powders Synthesized by Chemical Vapor Synthesis

Abstract:

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AlN powders by the chemical vapor synthesis (CVS) process in the AlCl3-NH3-N2-H2 system were successfully synthesized. Gasified AlCl3 as a starting material was generated by pre-heating system and transported to the tube furnace in NH3-N2-H2 atmosphere. High crystalline AlN was synthesized at over 900°C. The average particle size of spherical AlN powders decreased from 250 to 40nm with increasing the reaction temperature of the tube furnace. Porous nano-size particles synthesized at high reaction temperature have low oxygen contents.

Info:

Periodical:

Key Engineering Materials (Volumes 434-435)

Edited by:

Wei Pan and Jianghong Gong

Pages:

830-833

DOI:

10.4028/www.scientific.net/KEM.434-435.830

Citation:

J. H. Pee et al., "Properties of Nanosize Aluminum Nitride Powders Synthesized by Chemical Vapor Synthesis", Key Engineering Materials, Vols. 434-435, pp. 830-833, 2010

Online since:

March 2010

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Price:

$35.00

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