Properties of Nanosize Aluminum Nitride Powders Synthesized by Chemical Vapor Synthesis
AlN powders by the chemical vapor synthesis (CVS) process in the AlCl3-NH3-N2-H2 system were successfully synthesized. Gasified AlCl3 as a starting material was generated by pre-heating system and transported to the tube furnace in NH3-N2-H2 atmosphere. High crystalline AlN was synthesized at over 900°C. The average particle size of spherical AlN powders decreased from 250 to 40nm with increasing the reaction temperature of the tube furnace. Porous nano-size particles synthesized at high reaction temperature have low oxygen contents.
Wei Pan and Jianghong Gong
J. H. Pee et al., "Properties of Nanosize Aluminum Nitride Powders Synthesized by Chemical Vapor Synthesis", Key Engineering Materials, Vols. 434-435, pp. 830-833, 2010