Properties of Nanosize Aluminum Nitride Powders Synthesized by Chemical Vapor Synthesis

Abstract:

AlN powders by the chemical vapor synthesis (CVS) process in the AlCl3-NH3-N2-H2 system were successfully synthesized. Gasified AlCl3 as a starting material was generated by pre-heating system and transported to the tube furnace in NH3-N2-H2 atmosphere. High crystalline AlN was synthesized at over 900°C. The average particle size of spherical AlN powders decreased from 250 to 40nm with increasing the reaction temperature of the tube furnace. Porous nano-size particles synthesized at high reaction temperature have low oxygen contents.

• Periodical: Key Engineering Materials (Volumes 434-435)
• Pages: 830-833
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.434-435.830
• Online since: March 2010
• Authors: Jae Hwan Pee, Jong Chul Park, Kwang Taek Hwang, Soo Ryong Kim, Woo Seok Cho
• Keywords: AlCl₃-NH₃-N₂-H₂ System, Aluminum Nitride (AlN), Chemical Vapor Synthesis, Nitridation

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