Measurement and Visualization of Dynamics of Piezoelectric Microcantilever

Wei Jie Dong; Meng Wei  Liu; Cui Yan

doi:10.4028/www.scientific.net/KEM.437.30

Paper Titles

Dynamic Pressure Calibration of Pressure Sensors Using Liquid Step Pressure Generator
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Topical Tasks of Metrology due to Measuring Instruments Computerization
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Multivariant System of Perspectives
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Coherent Optical Method for Studies of Nanoscale Objects in Liquid Media Based upon Spatial Averaging of Data
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Measurement and Visualization of Dynamics of Piezoelectric Microcantilever
p.30

Microrelief Measurements for White-Light Interferometer with Adaptive Algorithm Interferogram Processing
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Model-Based Correction of Image Distortion in Scanning Electron Microscopy
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Motif Parameters Based Characterization of Line Edge Roughness of a Nanoscale Grating Structure
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Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 437Measurement and Visualization of Dynamics of...

Measurement and Visualization of Dynamics of Piezoelectric Microcantilever

Abstract:

Methods for measuring the resonant frequencies and visualizing the motion of the Pb(Zr0.5Ti0.5)O3 microcantilever are investigated. Considering the two-segment structure of the microcantilever, a self-exiting self-sensing method is proposed to obtain the fundamental resonant frequency. An optical system consisting of light microscope, CCD camera and video card is established to visualize the first two vibration mode shapes. The theoretical, measured and visualized first resonance of one micocantilever is 17.28 kHz, 17 kHz and 17.8 kHz, respectively. A theoretical second resonance of 84.16 kHz is seen at 71.9 kHz. The proposed method is valid for measuring and visualizing low resonances of active micro structure.

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Periodical:

Key Engineering Materials (Volume 437)

Pages:

30-34

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.437.30

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Online since:

May 2010

Authors:

Wei Jie Dong, Meng Wei Liu, Cui Yan

Keywords:

Dynamic, Micro Cantilever, Natural Frequency, Piezoelectric, Visualization

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