Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations
Chromatic aberrations in white-light interferometer can dramatically increase measurement nanorelief errors. It is shown that these errors can be more than 70 nm. They are result of changing effective wavelength within the measurement field. We have proposed the method for error calculation using measurement data and then their correction experimentally up to 10 nm.
Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and Ksenia Sapozhnikova
E. V. Sysoev "Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations", Key Engineering Materials, Vol. 437, pp. 51-55, 2010