Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations

Abstract:

Article Preview

Chromatic aberrations in white-light interferometer can dramatically increase measurement nanorelief errors. It is shown that these errors can be more than 70 nm. They are result of changing effective wavelength within the measurement field. We have proposed the method for error calculation using measurement data and then their correction experimentally up to 10 nm.

Info:

Periodical:

Edited by:

Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and Ksenia Sapozhnikova

Pages:

51-55

DOI:

10.4028/www.scientific.net/KEM.437.51

Citation:

E. V. Sysoev "Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations", Key Engineering Materials, Vol. 437, pp. 51-55, 2010

Online since:

May 2010

Authors:

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.