Microrelief Measurements for White-Light Interferometer with Adaptive Algorithm Interferogram Processing
The problem of reducing measurement errors of surface microrelief with nonuniform scattering properties using white-light interferometer was discussed. Adaptive algorithm of thresholding which allows us to set optimal threshold in every point of measuring surface was proposed. Application of this algorithm of threshold choice allows increasing dynamical range of interference detection more than in 10 times. The dependences of scanning interferometer resolution on differentional interferogram thresholding have been discussed.
Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and Ksenia Sapozhnikova
E. V. Sysoev and R. V. Kulikov, "Microrelief Measurements for White-Light Interferometer with Adaptive Algorithm Interferogram Processing", Key Engineering Materials, Vol. 437, pp. 35-39, 2010