Model-Based Correction of Image Distortion in Scanning Electron Microscopy
A new Monte-Carlo program for simulation image formation in scanning electron microscopy for real three-dimensional use is presented; factors of image distortions are realized in the program, in respect of future photogrammetric evaluation. A first attempt for generating a 3D-analysis of simulated images is shown.
Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and Ksenia Sapozhnikova
D. Gnieser et al., "Model-Based Correction of Image Distortion in Scanning Electron Microscopy", Key Engineering Materials, Vol. 437, pp. 40-44, 2010