Model-Based Correction of Image Distortion in Scanning Electron Microscopy

Abstract:

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A new Monte-Carlo program for simulation image formation in scanning electron microscopy for real three-dimensional use is presented; factors of image distortions are realized in the program, in respect of future photogrammetric evaluation. A first attempt for generating a 3D-analysis of simulated images is shown.

Info:

Periodical:

Edited by:

Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and Ksenia Sapozhnikova

Pages:

40-44

DOI:

10.4028/www.scientific.net/KEM.437.40

Citation:

D. Gnieser et al., "Model-Based Correction of Image Distortion in Scanning Electron Microscopy", Key Engineering Materials, Vol. 437, pp. 40-44, 2010

Online since:

May 2010

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$35.00

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