A Compact Signal Processing with Position Sensitive Detectors Utilized for Michelson Interferometer

Lih Horng Shyu; Yung Cheng Wang; Jui Cheng Lin

doi:10.4028/www.scientific.net/KEM.437.98

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Achieving Traceability of Industrial Computed Tomography
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Developments in Homodyne Interferometry
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Development of Innovative Fringe Locking Strategies for Vibration-Resistant White Light Vertical Scanning Interferometry (VSI)
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Compensation of Tilt Angles and Verification of Displacement Measurements with a Fabry-Perot Interferometer
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A Compact Signal Processing with Position Sensitive Detectors Utilized for Michelson Interferometer
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Improvement on Measuring Optical Nonlinear Phase Shift by Self-Aligned Interferometer
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Programmable Holographic Optical Elements as Adaptive Optics in Optical Diagnostics Devices
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High-Resolution Dimensional Metrology for Industrial Applications
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Traceability for Areal Surface Texture Measurement
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 437A Compact Signal Processing with Position...

A Compact Signal Processing with Position Sensitive Detectors Utilized for Michelson Interferometer

Abstract:

Interferometric signals of a homodyne Michelson interferometer appear in sinusoidal forms. In this investigation, new concepts for signal processing of Michelson interferometer are demonstrated. With the utilization of detection of position sensitive detector (PSD) and by the procedure of differential signals and the characteristic of symmetric waveform, a compact signal processing for homodyne Michelson interferometer has been developed. Its advantages include simplified procedure, fast processing and few electronic hardware. For experiment tests of the signal processing, a conventional homodyne Michelson interferometer has been constructed. Major components of the interferometer consist of laser light source, beam splitter, mirrors, PSD and piezo transducer for driving measurement mirror. To verify the performance of the signal processing, a commercial nanopositioning stage as reference standard has been utilized for comparison measurements. Through theoretical analysis and experiment tests, it can be proved that by the developed signal processing an interferometer possesses the optical resolution of 79 nm. With support of the developed signal processing, interferometers will possess the benefits of simply structure, few components and lower cost.

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Periodical:

Key Engineering Materials (Volume 437)

Pages:

98-102

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.437.98

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Online since:

May 2010

Authors:

Lih Horng Shyu, Yung Cheng Wang, Jui Cheng Lin

Keywords:

Interferometric Signal, Position Sensitive Detector (PSD), Subdivision

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DOI: 10.1016/s0141-6359(98)00023-3

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