Developments in Homodyne Interferometry

Walter Schott

doi:10.4028/www.scientific.net/KEM.437.84

Paper Titles

Design and Analysis of a 6-DOF Monolithic Nanopositioning Stage
p.61

In Situ Mechanical Property Measurement of Titania Nanowires
p.66

Computed Tomography for Application in Manufacturing Metrology
p.73

Achieving Traceability of Industrial Computed Tomography
p.79

Developments in Homodyne Interferometry
p.84

Development of Innovative Fringe Locking Strategies for Vibration-Resistant White Light Vertical Scanning Interferometry (VSI)
p.89

Compensation of Tilt Angles and Verification of Displacement Measurements with a Fabry-Perot Interferometer
p.95

A Compact Signal Processing with Position Sensitive Detectors Utilized for Michelson Interferometer
p.98

Improvement on Measuring Optical Nonlinear Phase Shift by Self-Aligned Interferometer
p.103

HomeKey Engineering MaterialsKey Engineering Materials Vol. 437Developments in Homodyne Interferometry

Developments in Homodyne Interferometry

Abstract:

The trend in many fields of enabling technologies, such as microelectronics, communications, microsystems, and micromechanics, toward imposing increasingly stringent demands upon precision continues. Those types of technologies allow creating micromechanical components having dimensions of a few micrometers that have to be accurately measured, positioned relative to one another, and assembled. In that conjunction, laser-interferometric metrology provides unique opportunities that combine measurements over large ranges at extraordinarily fine resolutions with traceability of measurement results to international length standards. Laser-interferometric metrological systems may be used for measuring displacements ranging from subnanometers to several meters, without need for reconfiguring the optical or electronic systems involved or their component devices.

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Periodical:

Key Engineering Materials (Volume 437)

Pages:

84-88

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.437.84

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Online since:

May 2010

Authors:

Walter Schott

Keywords:

Angle-and-Displacement Measurement, Frequency-Stabilized He-Ne Laser, Laser Interferometer, Metrology, Plane-Mirror Interferometer

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