Development of Innovative Fringe Locking Strategies for Vibration-Resistant White Light Vertical Scanning Interferometry (VSI)

Abstract:

White light interferometry has become an important method for measuring micro surface profiles with a long vertical range and nano-scale resolution. However, environmental vibration encountered in in-field optical inspection is usually unavoidable and it affects measurement performance significantly. Isolating vibration sources from the measurement system sometimes is not completely effective, especially within complicated in-field fabrication environment. Therefore, in this research we aim to develop a novel method in achieving white-light fringe-locking condition during vertical scanning processes. The developed optical system consists of white light source, a Mirau objective, a PZT vertical scanner, an optical band-pass filter and two image sensing devices. The developed system generates a high and a low coherent interferograms, simultaneously captured by two charged coupled devices (CCDs). The high coherent interferogram is employed to detect high-speed nano-scale displacement and direction of the external vibration. An innovative real time fringe-locking operation is performed and a new vertical scanning technique is performed accordingly to isolate vertical scanning from environmental disturbances. The feasibility of the anti-vibration VSI system is verified by performing some of industrial in-field examples. Based on the experimental result, the fringe locking technique can improve the measurement result.

• Periodical: Key Engineering Materials (Volume 437)
• Pages: 89-94
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.437.89
• Online since: May 2010
• Authors: Liang Chia Chen, Abraham Mario Tapilouw, Sheng Lih Yeh, Shyh Tsong Lin, Jin Liang Chen, Huan Chi Huang
• Keywords: Active Feedback System, Automatic Optical Inspection (AOI), Nano-Scale Measurement, Real-Time Control System, Vibration Resistant

References

[1] T. Yoshino, M. Nara, S. Mnatzakanian, B.S. Lee, and T.C. Strand: Laser diode feedback interferometer for stabilization and displacement measurements. Appl. Opt., 26 (1987), pp.892-897.

DOI: 10.1364/ao.26.000892

[2] Glen C. Cole, James H. Burge, and Lee R. Dettmann: Vibration stabilization of a phase-shifting interferometer for large optics. Proc. SPIE, Vol. 3134 (1997), p.438.

DOI: 10.1117/12.279132

[3] T. Yoshino and H. Yamaguchi: Closed-loop phase-shifting interferometry with a laser diode. Opt. Lett., 23 (1998), pp.1576-1578.

DOI: 10.1364/ol.23.001576

[4] J. Liu, I. Yamaguchi: Fringe locking in a laser diode interferometer by optical feedback during modulation of injection current. Optical Review, 6 (2) (1999), pp.100-103.

DOI: 10.1007/s10043-999-0100-x

[5] C. Zhao and J.H. Burge: Vibration-Compensated Interferometer for Surface Metrology. Appl. Opt., 40 (2001), pp.6215-6222.

DOI: 10.1364/ao.40.006215

[6] A.A. Freschi and J. Frejlich: Adjustable phase control in stabilized interferometry. Opt. Lett., 20 (1995), pp.635-637.

DOI: 10.1364/ol.20.000635

[7] V.V. Krishnamachari, E.R. Andresen, S.R. Keiding, and E.O. Potma: An active interferometer-stabilization scheme with linear phase control. Opt. Express, 14 (2006), pp.5210-5215.

DOI: 10.1364/oe.14.005210

[8] Y. Bao, H. Su, and Y. Yang: Fringe-locking phenomenon in a laser diode interferometer with optical feedback. Proc. SPIE, Vol. 5638 (2005), p.797.

DOI: 10.1117/12.575243

[9] I. Yamaguchi, J. Liu, and J. Kato: Active phase-shifting interferometers for shape and deformation measurement. Opt. Eng., 35 (1996), pp.2930-2937.

DOI: 10.1117/1.600956

[10] J. -Y. Liu, I. Yamaguchi, J. -I. Kato, T. Nakajima: Real-time surface shape measurement by an active interferometer. Optical Review, 4 (1 PART B) (1997), pp.216-220.

DOI: 10.1007/bf02931684

[11] L. He: Vibration-compensated interferometry system using phase-modulating interference fringe subdivision technology. Appl. Opt., 45 (2006), pp.7987-7992.

DOI: 10.1364/ao.45.007987

[12] F. Gao, R. K. Leach, J. Petzing, J. M. Coupland: Surface measurement errors using commercial scanning white light interferometers. Meas. Sci. Technol., 19 015303 (2008), 13p.

DOI: 10.1088/0957-0233/19/1/015303

[13] A. Olszak and J. Schmit: High-stability white-light interferometry with reference signal for real-time correction of scanning errors. Opt. Eng., 42 (2003), 54.

DOI: 10.1117/1.1523942

[14] J. Schmit, A. G. Olszak, and S. D. McDermed: White-light interferometry with reference signal. Proc. SPIE, Vol. 4777 (2002), p.102.

DOI: 10.1117/12.472209

[15] T. Yamauchi, H. Iwai, M. Miwa, and Y. Yamashita: Measurement of topographic phase image of living cells by white-light phase-shifting microscope with active stabilization of optical path difference. Proc. SPIE, Vol. 6429 (2007), 64291Q.

DOI: 10.1117/12.699718

[16] X. Li, T. Yamauchi, H. Iwai, Y. Yamashita, H. Zhang, and T. Hiruma: Full-field quantitative phase imaging by white-light interferometry with active phase stabilization and its application to biological samples. Opt. Lett., 31 (2006).

DOI: 10.1364/ol.31.001830

[17] L.C. Chen, A.M. Tapilouw, S.L. Yeh, S.T. Lin, Y.S. Lin: Development of Innovative Fringe Locking Strategies for Vibration-Resistant White Light Vertical Scanning Interferometry (VSI). Proc. The 9th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII-2009), Vol. 1 (2009).

DOI: 10.4028/www.scientific.net/kem.437.89