In this paper, the influence of grain size and blank hold force on micro deep drawing stress and displacement are studied by self-made device. The results show that drawing stress decreases and elongation rate increases with the increase of grain size, the concentrated force area of cylinder-shaped part is transferred from the area punch fillet to die fillet area. Twin grain ratio and twinning degree near the punch fillet are increasing. Twin grain distribution becomes uneven with the increase of grain size. In micro deep drawing, the displacement increases with the increase of blank hold force, meanwhile, forming stress almost remains constant. The flange wrinkling can be inhibited.