MEMS Assisted Fabrication of Cr Nanobowls
Various bowl-shape nanostructures have attracted widely attention for their potential applications in novel optical, electronic and biomedical fields. With the assistance of MEMS standard process, we present an inexpensive and fast approach in this paper for the fabrication of 2-D interconnected networks of Cr nanobowls. Spin-coated monolayer silica-polymer hexagonal ordered colloidal crystal was used as starting templates to create polymer nanowells. Then metal deposition and calcination process helped to develop Cr nanobowls with polymer nanowells as templates. The 2-D nanostructures were characterized by field emission scanning electron microscopy (SEM). Our fabrication approach of nanobowls can be extended to a wide range of metal materials and substrates with controlled size and wall thickness.
D. Di et al., "MEMS Assisted Fabrication of Cr Nanobowls", Key Engineering Materials, Vol. 483, pp. 521-525, 2011