Vibration Characteristic Analysis of V-Shaped Electrothermal Microactuator

Zhen Lu Wang; Xue Jin Shen; Ling Zhou; Xiao Yang Chen

doi:10.4028/www.scientific.net/KEM.503.118

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 503Vibration Characteristic Analysis of V-Shaped...

Vibration Characteristic Analysis of V-Shaped Electrothermal Microactuator

Abstract:

This paper is focused on the finite element analysis (FEA) and theoretical calculation of vibration characterization of V-shaped electrothermal microactuator. A vibration mechanical model about V-shaped electrothermal microactuator is presented. By having a comparison between FEA and theoretical calculation about natural frequencies of V-shaped electrothermal microactuator, the maximum error is within 0.19 %. This paper also analyzes the influences of microactuator geometric parameters on natural frequency. The length and thickness have larger effect on the natural frequency of the actuator, while the angle and width have less effect on the natural frequency.

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Periodical:

Key Engineering Materials (Volume 503)

Pages:

118-121

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.503.118

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Online since:

February 2012

Authors:

Zhen Lu Wang, Xue Jin Shen, Ling Zhou, Xiao Yang Chen

Keywords:

Natural Frequency, Vibration Characteristics, V-Shaped Electrothermal Microactuator

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