Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports

Wu Zhou; Bei Peng; Xiao Hong Hao

doi:10.4028/www.scientific.net/KEM.503.18

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A Monolithic Integrated Pressure Sensor
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A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 503Pull-In Voltage of Parallel-Plate Capacitor Fixed...

Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports

Abstract:

Parallel-plate capacitor whose plates both fixed to elastic supports is presented and analyzed in this paper, and its cantilevers model is analyzed to study the parameter dependence of pull-in voltage. The whole process of voltage calculation is based on material mechanics theories and analytical methods, and the results are verified by simulation of MEMS software, which is mainly aiming at the effects of plate dimensions on pull-in voltage. It is concluded that the longer are the supporting beams, the smaller are the effects of plate’s parameters on voltage, besides, the effect extent of longitudinal length of plate is little larger than that of transverse length.

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Periodical:

Key Engineering Materials (Volume 503)

Pages:

18-23

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.503.18

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Online since:

February 2012

Authors:

Wu Zhou, Bei Peng, Xiao Hong Hao

Keywords:

MEMS, Parallel-Plate Capacitor, Pull-In

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References

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