Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane

Ming Xin Xue; Meng Wei  Liu; Xin Li; Jun Hong Li

doi:10.4028/www.scientific.net/KEM.503.29

Paper Titles

A Monolithic Integrated Pressure Sensor
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A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope
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Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports
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Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror
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Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si₃N₄ Multilayered Composite Membrane
p.29

New Isolation Optimization Method of RF MEMS Capacitive Switches
p.35

Design, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors
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MEMS Grating with Interdigitated-Comb Structure
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Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 503Design and Fabrication of a MEMS Flexural Plate...

Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si₃N₄ Multilayered Composite Membrane

Abstract:

The MEMS A₀ mode Lamb wave (flexural plate wave) ultrasonic devices have been shown to be extremely useful for sensor and actuator applications. The design and fabrication process of a MEMS flexural plate wave device based on the LTO/ZnO/LTO/Si₃N₄ multilayered composite membrane are presented. The flexural plate wave was respectively launched and received by both Al interdigital transducers. In order to reduce the stress of the thin membrane induced mainly by the in-plane compressive stress of ZnO film, two fabrication process of DC and RF magnetron sputtering were used to deposit the ZnO films, respectively. The FPW device based on LTO(0.2μm)/ZnO(1μm)/ LTO(2μm)/Si3N4(0.5μm) thin membrane was fabricated. The center frequency of the MEMS flexural plate wave device is measured at 3.69MHz, which agrees with the theoretical predictions.

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Periodical:

Key Engineering Materials (Volume 503)

Pages:

29-34

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.503.29

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Online since:

February 2012

Authors:

Ming Xin Xue, Meng Wei Liu, Xin Li, Jun Hong Li

Keywords:

Flexural Plate Wave, Interdigital Transducers, Multilayered Composite Membrane, ZnO Piezoelectric Film

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