Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror

Chi Zhang; Yun Han Chen; Zheng You; Hu Huang

doi:10.4028/www.scientific.net/KEM.503.24

Paper Titles

The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid
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A Monolithic Integrated Pressure Sensor
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A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope
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Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports
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Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror
p.24

Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si₃N₄ Multilayered Composite Membrane
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New Isolation Optimization Method of RF MEMS Capacitive Switches
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Design, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors
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MEMS Grating with Interdigitated-Comb Structure
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 503Research on Two-Dimensional Scanning...

Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror

Abstract:

A two-dimensional MEMS resonant mirror is presented in this paper, which is capable of scanning a laser beam two-dimensionally in the both vibration modes. Based on the MEMS resonant mirror, a simulation method is presented to study the two-dimensional scanning characteristics. The scanning time of a frame is obtained and the impacts on the scanning time of a frame by the scanning parameters are simulated and analyzed. The simulation results have a great significance for the two-dimensional MEMS resonant mirror in space applications.

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Periodical:

Key Engineering Materials (Volume 503)

Pages:

24-28

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.503.24

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Online since:

February 2012

Authors:

Chi Zhang, Yun Han Chen, Zheng You, Hu Huang

Keywords:

Lissajous Figure, MEMS, Resonant Mirror, Two-Dimensional Scanning

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References

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