MEMS Grating with Interdigitated-Comb Structure

Abstract:

Grating as an important spectral component can be applied to spectral analysis, filtering, dispersion compensation, sensing and so on. Their advantages are compactness, potentially high actuation speed and the ability to deflect light at large angles. In this paper, a MEMS interdigitated-comb grating actuated by a comb-drive actuator is presented. An experiment is performed to demonstrate how the proposed grating works with an applied voltage. At 85V, the displacement of comb-drive actuator can achieve 2.1μm; accordingly the gap between the interdigitated-comb gratings varies by 2.1μm. The mechanical and the optical sensing properties of the MEMS grating are both analyzed in this paper. This grating can be widely used in optical sensor and to detect the micro-displacement.

• Periodical: Key Engineering Materials (Volume 503)
• Pages: 49-54
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.503.49
• Online since: February 2012
• Authors: Heng Zhang, Jun Yao, Feng Gang Tao, Xu Ye Zhuang
• Keywords: Interdigitated-Comb Grating, MEMS, Micro-Displacement, Optical Sensor

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