Size-Dependence on Load Properties of a Silicon Nanobeam

Jing Wang; Hong Yan Zhang

doi:10.4028/www.scientific.net/KEM.503.406

Paper Titles

Boron-Doped Nanocrystalline Silicon Thin Films Prepared by PECVD
p.386

Design and Realization of Modular MEMS-Based Attitude Measurement and Control System Based Wireless Sensor Networks
p.393

Effects of Different Package Structures on Thermal Properties of High Power White LED
p.397

Design of Ethernet Interface Based on FPGA and W5300
p.402

Size-Dependence on Load Properties of a Silicon Nanobeam
p.406

Integrated Micro-Sensor Detection System of Meteorological Information
p.411

Design of a Digital Decimation Filter for High-Precision 4-Order Sigma-Delta ADC
p.415

Detecting DNA Using a Single Graphene Pore by Molecular Dynamics Simulations
p.423

An Improved Sensitivity Non-Enzymatic Glucose Sensor Based on a Nano-Gold Modified Ag Electrode
p.427

HomeKey Engineering MaterialsKey Engineering Materials Vol. 503Size-Dependence on Load Properties of a Silicon...

Size-Dependence on Load Properties of a Silicon Nanobeam

Abstract:

A semi-continuum approach is developed for mechanical analysis of a silicon nanobeam, which captures the atomistic physics and retains the efficiency of continuum models. Young’s modulus of the silicon (001) nanobeam along [100] direction is obtained by the developed semi-continuum approach, which decreases dramatically as the size of a silicon nanobeam width and thickness scaling down. Taking into account the variations of Young’s modulus at different size, the load properties of the nanobeam is computed. The model predicts the deflection of the nanobeam is size-dependence. Introduction