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Ba2TiO4 and Ba4Ti13O30 Thick Films Prepared by Laser Chemical Vapor Deposition and their Microstructure

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Abstract:

Ba2TiO4 and Ba4Ti13O30 Thick Films Were Prepared by Laser Chemical Vapor Deposition Using Ba- and Ti-Dipivaloylmethanate Precursors. Single-Phase Ba2TiO4 Thick Films Were Obtained at 845–946 K and Ba/Ti Source Molar Ratio 2.4. Single-Phase Ba4Ti13O30 Films Were Obtained at 944–1011 K and Ba/Ti Source Molar Ratio 0.38. Ba2TiO4 Thick Films Consisted of Truncated Grains, while Ba4ti13o30 Thick Films Had Shellfish-Like Grains. Ba2TiO4 and Ba4Ti13O30 Thick Films Showed a Columnar Growth and their Deposition Rates Were 72 and 132 μm h−1, Respectively.

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Periodical:

Key Engineering Materials (Volume 508)

Pages:

199-202

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.508.199

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Online since:

March 2012

Authors:

Dong Yun Guo, Akihiko Ito, Rong Tu, Takashi Goto

Keywords:

Ba2TiO4, Ba4Ti13O30, Laser CVD, Thick Film

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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