Orientation and Morphology of LiCoO2 Prepared by Chemical Vapor Deposition on Al2O3 Single Crystal

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Lithium Cobaltate (LiCoO2) Films Were Prepared on the (001), (110), (110) and (112) Planes of Al2O3 Single Crystals Substrates by Metal Organic Chemical Vapor Deposition, and the Phases, Orientated Textures and Surface Morphologies Were Examined. (001)-Oriented LiCoO2 Films Were Obtained on (001) and (110) Al2O3 Substrates, while (018)- and (104)-Oriented LiCoO2 Films Were Grown on (110) and (112) Al2O3 Substrate. Triangular and Elongated Rectangular Faceted Structures Were Directionally Aligned, and (001)- and (018)-Oriented Grains Were Epitaxially Grown on (001) and (110) Al2O3 Substrates. Randomly Arranged Polygonal Faceted Structures Were Observed in the (001)-Oriented Licoo2 Film on (110) Al2O3 Substrate, while Locally Inhomogeneous Grains Were Observed in the (104)-Oriented LiCoO2 Film on (1_,12) Al2O3 Substrate.

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300-303

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March 2012

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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