GIAXD and XPS Characterization of sp3C Doped SiC Superhard Nanocomposite Film

Jian Yi; Xiao Dong He; Yue Sun; Zhi Peng Xie; Wei Jiang Xue; Fen Yan Cao

doi:10.4028/www.scientific.net/KEM.512-515.971

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 512-515GIAXD and XPS Characterization of sp3C Doped SiC...

GIAXD and XPS Characterization of sp³C Doped SiC Superhard Nanocomposite Film

Abstract:

The sp³C doped SiC superhard nanocomposite films had been deposited on stainless steel (SS) substrates at different temperature by electron beam-physical vapor deposition (EB-PVD). The sp3C doped SiC film was studied by grazing incidence X-ray asymmetry diffraction (GIAXD), and X-ray photoelectron spectroscopy (XPS). The results of GIAXD showed that the sp³ doped SiC nanocomposite films were not perfect crystalline, which was composed with fine SiC nanocrystals, and a second phase very similar with diamond like carbon (DLC). XPS analysis showed that the excess C existing in films and turned from diamond into DLC from the surface to inner of film.

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Key Engineering Materials (Volumes 512-515)

Pages:

971-974

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.512-515.971

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Online since:

June 2012

Authors:

Jian Yi, Xiao Dong He, Yue Sun, Zhi Peng Xie, Wei Jiang Xue, Fen Yan Cao

Keywords:

GIAXD, Microstructure, Silicon Carbide (SiC), XPS

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References

[1] A.V. Semenov, and V.M. Puzikov, Nanocrystalline SiC films prepared by direct deposition of carbon and silicon ions, Thin Solid Films 516 (2008) 2899-2903.

DOI: 10.1016/j.tsf.2007.05.059

Google Scholar

[2] F. Liao, S.L. Girshick, and W.M. Mook, Superhard nanocrystalline silicon carbide films, Appl. Phys. Lett. 86 (2005) 171913.

DOI: 10.1063/1.1920434

Google Scholar

[3] X.D. He, J. Yi, and Y. Sun, Surface hardness enhancemement in sp3 C doped SiC nanocomposite films, Appl. Phys. Lett. 91 (2007) 241914.

DOI: 10.1063/1.2824811

Google Scholar

[4] B.A. Movchan, Inorganic materials and coatings produced by EBPVD, Surf. Eng. 22 (2006) 35-46.

Google Scholar

[5] A. Hu, I. Alkhesho, and H. Zhou, Optical and microstructural properties of diamond-like carbon films grown by pulsed laser deposition, Diam. Relat. Mater. 16 (2007) 149-154.

DOI: 10.1016/j.diamond.2006.04.008

Google Scholar

[6] T.W. Scharf, R.D. Ott, J.A. Barnard, Structural and Tribological Characterization of Protective a:C and a:CNx Overcoats for Next Generation Hard Disks, J. Appl. Phys. 85 (1999) 3142-3154.

DOI: 10.1063/1.369654

Google Scholar

[7] T.N. Taylor, The surface composition of SiC powders and whiskers: An XPS study, J. Mater. Res. 4 (1989) 189-203.

Google Scholar