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Fabrication and Characterization of AFM Probe Integrated with High-Aspect-Ratio Diamond Tip

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Abstract:

In order to realize a smart nano-machining and measurement system based on atomic force microscope (AFM), we have been developing diamond probes with a high-aspect-ratio, sharpened diamond tip. In this paper, we described the most important micromachining techniques for the fabrication of the diamond probes. The high-aspect-ratio diamond microstructures were successfully fabricated by employing our proposed two-step reactive ion etching (RIE) processes. A novel bonding technique of diamond to Si at wafer level was also developed by using an inorganic-organic hybrid sol-gel film (MeSiO3/2) as an adhesive layer to prepare a diamond/SOI wafer as the starting material. Moreover, we demonstrated the applicability of a fabricated diamond probe not only to AFM measurements but also to a tool for nanomachining.

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Periodical:

Key Engineering Materials (Volumes 523-524)

Pages:

569-574

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.523-524.569

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Online since:

November 2012

Authors:

Takayuki Shibata, Kazuhiro Maruno, Moeto Nagai, Takahiro Kawashima, Takashi Mineta, Eiji Makino

Keywords:

Atomic Force Microscope (AFM), CVD Diamond, Diamond AFM Probe, MEMS

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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