Fabrication of Hole-Type Microcantilevers Using FIB and its Evaluations

Abstract:

A high sensitive mass biosensor using a piezoresistive hole-type microcantilever has been developed. To optimize the cantilever shape for high sensitivity easily, we demonstrate frame-type cantilevers with holes on the surface fabricated by Focused Ion Beam (FIB) method and evaluate their sensitivity in both air and liquid. Resonance frequency of hole-type cantilevers increased about 20% and 40% in air and in water, respectively. On the other hand, while Q value decreased from 10% to 30% in air, it increased sharply from 0% to 50% in water with increasing of hole-size. Especially, when we increased the frame size from 0.5 µm to 2.5 µm, resonance frequency changing and Q value changing in water were 60% and 125%, respectively. However, the Q value of large hole (36x60µm²) in water inversely decreased due to the decline in rigidity. The sensitivity of hole-type cantilever of Δm/Δf (hole-size = 12x12μm²; frame-size = 2.5μm) was 23.1 fg/Hz, 10 times smaller than the conventional type cantilever.

• Periodical: Key Engineering Materials (Volume 534)
• Pages: 251-256
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.534.251
• Online since: January 2013
• Authors: Anh Hoang Truong, Hayato Sone, Tomoyuki Kawakami, Sumio Hosaka
• Keywords: Biosensor, FIB, Mass Sensitivity, Microcantilever, Q Value, Reduction of Viscous Resistance, Resonance Frequency

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