Application of Laser Doppler Technique in Detecting the Dynamic Parameter of MEMS Device

Guang Min Yuan; Wei Zheng Yuan; Yao Bo Liu; Hong Long Chang

doi:10.4028/www.scientific.net/KEM.562-565.1083

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 562-565Application of Laser Doppler Technique in...

Application of Laser Doppler Technique in Detecting the Dynamic Parameter of MEMS Device

Abstract:

In order to test the dynamic performance of MEMS devices accurately, the laser Doppler vibrometer was adopted to test the frequency characteristics and surface vibration of the MEMS scanning mirror. The measuring formulas of the object motion velocity and displacement were derived. A kind of MEMS scanning mirror was tested using the established optical testing system. The measurement results show that the resonance frequency characteristic and the transient response characteristic is 269Hz and 60ms respectively which are consistent with the theoretical analysis. The method has significant reference value to the application of the laser Doppler technique.

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Periodical:

Key Engineering Materials (Volumes 562-565)

Pages:

1083-1087

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.562-565.1083

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Online since:

July 2013

Authors:

Guang Min Yuan, Wei Zheng Yuan, Yao Bo Liu, Hong Long Chang

Keywords:

Frequency Characteristic, Laser Doppler, MEMS Scanning Mirror, Testing

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