Development of a Nanomanipualtion System for Handling Nanowires

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A compact and versatile nanomanipulation platform and its dirve-control system are being developed. This nanomanipulation sytem is aimed to handle nanowires (NWs) and fabricate nanostructures by NWs in a Scanning Electron Microscope (SEM). The excellent performance of the compact manipulator developed with corase and fine positioning in one unit has been demonstrated, which shows that the resolution is 8 nm and the steps are from 50 nm to 0.8 μm. For the power supply of the manipulator, a three-output driver is designed with a high-power integrated operational amplifier based on a mixed approach of voltage control and current control. The planar push-and-lift handling of NWs is carried out by the use of two tips to demonstrate the capability of the nanomanipulation sytem inside SEM.

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Key Engineering Materials (Volumes 562-565)

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1092-1097

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July 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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