Numerical Analysis of Molding Process for Roll Imprinting Based on ABAQUS

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Abstract:

To optimize the molding parameters investigating based on Finite Element Analysis is done for roll imprinting. The heat curable material PMMA is employed in the simulation, which is considered as an elastic perfectly-plastic material. Three factors are taken as the evaluation criterions, which are pattern transfer rate, maximum width ratio and maximum depth ratio. Several key parameters, such as the pattern size, the distance between mold and surface of PMMA, the duty cycle of the patterns, rotation velocity of the mold and Young’s modulus of the PMMA and pressing force, are analyzed systematically. Simulation show three of them are main influence factors on the imprinting quality, which are the distance between roller and surface of the polymer, the duty cycle of the patterns and the elastic modulus of the polymer. While the influence of pattern size and rotation speed can be ignored. The results indicate that the duty cycle should be greater than 2 and the distance between roller periphery and surface of the polymer should be -30um to ensure the fidelity of the pattern replication. The simulation results are significant for optimizing the parameters in the imprinting process.

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Key Engineering Materials (Volumes 562-565)

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114-118

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July 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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