On the Test Method of Dynamic Characteristics of MEMS Components

Abstract:

The paper developed a set of small split Hopkinson pressure/tensile bar testing system (SSHPB/SSHTB) to study the dynamic characteristics of the micro-electromechanical system (MEMS) material and components, by which the dynamic characteristics of MEMS nickel material and planar S-form micro-spring were got. The dynamic Youngs modulus of LIGA nickel under the strain rate of 2×10³s^-1 got by the SSHPB is about 250GPa, which is slightly higher than that under static condition. The deformation peculiarity of the planar S-form micro-spring is also got by the SSHTB, which is uneven due to the spreading of the stress wave in the micro-spring. The result of the paper is valuable for providing feasible directions to the optimization design and manufacture of the MEMS components.

• Periodical: Key Engineering Materials (Volumes 562-565)
• Pages: 119-124
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.562-565.119
• Online since: July 2013
• Authors: Guang He, Ya Jun Wang, Wen Rui Ma
• Keywords: Dynamic Mechanical Characteristics, High-Speed Image Acquisition, MEMS Components, Small Split Hopkinson Pressure/Tensile Bar Testing System, Strain Rate Related

References

[1] Shi Gengchen, Micro-electromechanical System Technology, National Defence Industry Press, Beijing, 2002.

[2] Li Yulong, Guo Weiguo, Xu Fei, et al, The extended application of Hopkinson bar technique, J. Explosion and Shock Waves. 26 (2006) 385-394.

[3] Koichi Ishikawa, Hiroyuki Watanabe, Toshiji Mukai, High strain rate deformation behavior of an AZ91 magnesium alloy at elevated temperatures, J. Materials Letters. 59 (2005) 1511-1515.

DOI: 10.1016/j.matlet.2005.01.012

[4] Chen Xiaohong, Wu Hengyi, Huang Wen, et al, Experimental technique for high temperature tensile impact, J. Journal of Experimental Mechanics. 18 (2003) 39-44.

[5] Niranjan K. Naik, Ravikumar Gadipatri, Narasimha Moorthy Thoram, Shear properties of epoxy under high strain rate loading, J. Polymer Engineering and Science. 50 (2010) 780-788.

DOI: 10.1002/pen.21585

[6] Xiao Dawu, Li Yinglei, Hu Shisheng, Constitutive model of pure zirconium under high temperature and high strain rate, J. Chinese Journal of High Pressure Physics. 23 (2009) 46-49.

[7] Guang He, Geng-chen Shi, On the mechanical behavior of LIGA nickel, C. // 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2009), Shenzhen, China, (2009), 758-762.

DOI: 10.1109/nems.2009.5068689

[8] Zhang Huiying, Liu Huihang, Wang Decheng, Spring Manual, Mechanical Industry Press, Beijing, 2008.