Fabrication of Sub-Micro Metal Tips for In-Plane Field Emission Research

Li Feng Wang; Lei Han; Jie Ying Tang; Jing Song; Qin Gan Huang

doi:10.4028/www.scientific.net/KEM.562-565.28

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Fabrication of Low Stress PECVD-SiNx Film in High Frequency Mode
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Fabrication of the Nanoscale Flat-Bottomed and Lamellar Structures on HOPG Surface by STM-Based Electric Lithography
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 562-565Fabrication of Sub-Micro Metal Tips for In-Plane...

Fabrication of Sub-Micro Metal Tips for In-Plane Field Emission Research

Abstract:

Fabrication of a novel in-plane field emission diode structure is presented. Sub-micro metal tips were obtained using a two-step lithography method. The Minimum width of the metal tips was less than 100nm, and the minimum spacing of 145.7nm was obtained. The I-V characters in atmospheric environment before and after the silicon etching were measured.

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Periodical:

Key Engineering Materials (Volumes 562-565)

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28-32

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.562-565.28

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Online since:

July 2013

Authors:

Li Feng Wang, Lei Han, Jie Ying Tang, Jing Song, Qin Gan Huang

Keywords:

Electron Beam Lithography, In-Plane Field Emission, Metal Tips, Sub-Micro

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References

[1] A. V. Crewe, M. Isaacson, D. Johnson, A Simple Scanning Electron Microscope, Rev. Sci. Instrum., 40(1969) 241-246.

DOI: 10.1063/1.1683910

Google Scholar

[2] A. A. Talin, K. A. Dean and J. E. Jaskie, Field emission displays: a critical review, Solid-State Electron., 45(2001), 963-976.

DOI: 10.1016/s0038-1101(00)00279-3

Google Scholar

[3] Jung-Hyeon Park, Hyung-Il Lee, Heung-Sik Tae, Jeung-Soo Huh, and Jung-Hee Lee, Lateral Field Emission Diodes Using SIMOX Wafer, IEEE Trans. Electron Dev., 44(1997), 1018-1021.

DOI: 10.1109/16.585560

Google Scholar

[4] C. A. Spindt, C. E. Holland, A. Rosenberg, and I. Brodie, Field-emitter arrays for vacuum microelectronics, IEEE Trans. Electron Dev., 38(1991), 2355-2363.

DOI: 10.1109/16.88525

Google Scholar

[5] Veljko Milanovic, Lance Doherty, Dana A. Teasdale, Siavash Parsa, and Kristofer S. J. Pister, Micromachining Technology for Lateral Field Emission Devices, IEEE Trans. Electron Dev., 48(2001), 166-173.

DOI: 10.1109/16.892185

Google Scholar

[6] Cheol-Min Park, Moo-Sup Lim, and Min-Koo Han, A Novel In Situ Vacuum Encapsulated Lateral Field Emitter Triode, IEEE Electron Dev. Lett., 18(1997), 538-540.

DOI: 10.1109/55.641438

Google Scholar

[7] R. H. Fowler and L. Nordheim, Electron emission in intense electric fields, in Proc. R. Soc. Lond. A, 119(1928), 173-181.

Google Scholar

[8] C. A. Spindt, I. Brodie, L. Humphrey, and E. R. Westerberg, Physical properties of thin-film field emission cathodes with molybdenum cones, J. Appl. Phys., 47(1976), 5248–5263.

DOI: 10.1063/1.322600

Google Scholar

[9] George Fursey, Field emission in vacuum micro-electronics, Kluwer Academic/Plenum Publishers, New York, 2005.

Google Scholar