Analysis of Fabrication Errors on Micro-Spring's Elastic Coefficient

Xin Shu; Wen Zhong Lou; Yue Zhao; Ming Ru Guo; Yue Fu; Ying Wang

doi:10.4028/www.scientific.net/KEM.562-565.3

Paper Titles

Preface

Analysis of Fabrication Errors on Micro-Spring's Elastic Coefficient
p.3

Design and Fabrication of an Aerodynamic Micro-Air Journal Bearing Using Micro-Wire Electrical Discharge Machining
p.8

Fabrication and Characteristics of the Nano-Polysilicon Thin Film Transistors
p.13

Fabrication and Characterization of Tin Oxide Inverse Opal by Template Method
p.18

Fabrication of Low Stress PECVD-SiNx Film in High Frequency Mode
p.22

Fabrication of Sub-Micro Metal Tips for In-Plane Field Emission Research
p.28

Fabrication of Super-Hydrophobic Surface on Stainless Steel Using Chemical Etching Method
p.33

Fabrication of the Nanoscale Flat-Bottomed and Lamellar Structures on HOPG Surface by STM-Based Electric Lithography
p.45

HomeKey Engineering MaterialsKey Engineering Materials Vols. 562-565Analysis of Fabrication Errors on Micro-Spring's...

Analysis of Fabrication Errors on Micro-Spring's Elastic Coefficient

Abstract:

Because fabrication errors have a great influence on micro-springs elastic coefficient, and it is difficult to reduce the influence through fabrication process methods at this stage, the authors propose solutions through design process to reduce the sensitivity of Elastic coefficient of fabrication errors. The authors derived error propagation formula through multivariate function Taylor series expansion method, and made a quantitative analysis of the influence of fabrication errors, then summarized the influence rules of the size parameters on dispersibility of elastic coefficient K, finally proposed the method to degrade device performance dependent on the fabrication precision.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 562-565)

Pages:

3-7

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.562-565.3

Citation:

Cite this paper

Online since:

July 2013

Authors:

Xin Shu, Wen Zhong Lou, Yue Zhao, Ming Ru Guo, Yue Fu, Ying Wang

Keywords:

Elastic Coefficient, Errors Transfer Function, Fabrication Errors, Microdevice Design

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Liu Jianhua. The study of MEMS Fuse mechanism [D]. Beijing Institute of Technology, 2008.

Google Scholar

[2] Wang Wenhao. The study of typical Micro spring characteristics and design[D]. Beijing Institute of Technology, 2010.

Google Scholar

[3] QIN Yu, FENG Zhijing. Influence of manufacturing errors on the stiffness of a uniaxial circular flexure[J]. Journal of Tsinghua University (Sci&Tech), 2007, 47(8): 1320-1324.

Google Scholar

[4] Li Hua, Shi Geng-chen. Analysis of Application Pattern of MEMS Micro-spring [J]. Chinese Journal Of Sensors And Actuators, 2007, 20(12)：2709-2712．

Google Scholar