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Properties of ZnS Films Deposited by Radio Frequency Magnetron Sputtering

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Abstract:

In this work, zinc sulfide (ZnS) thin films were prepared by radio frequency (RF) magnetron sputtering on glass substrates. The effects of sputtering power, working pressure, substrate temperature and annealing treatment on the structural and optical properties of ZnS films were studied using X-ray diffraction and UV-visible spectrometer in detailed.

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High-Performance Ceramics VIII View Preview

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Periodical:

Key Engineering Materials (Volumes 602-603)

Pages:

966-969

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.602-603.966

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Online since:

March 2014

Authors:

Lei Zhang, Jian Huang*, Hui Min Yang, Ke Tang, Mei Ai Lin, Bing Ren, Kai Xun Zhang, Lin Jun Wang

Keywords:

Film, Radio Frequency Magnetron Sputtering, ZnS

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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