Accuracy Analysis of Quality Factor Measurement Based on Time Domain Method for MEMS Resonators

Abstract:

To reduce the measurement cost and time, a time domain measurement method of quality factor for MEMS resonator is presented in this paper. The relation curve between quality factor and vacuum level is obtained. The results indicate that measurement error is larger under high vacuum level when the sampling frequency is lower. The reason causing the error is analyzed and measurement precision is improved by increasing the sampling frequency. The measurement results indicate time domain measurement is advisable and improvable for MEMS resonator measurement.

• Periodical: Key Engineering Materials (Volumes 609-610)
• Pages: 1131-1137
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.609-610.1131
• Online since: April 2014
• Authors: Ling Yun Wang*, Xiao Hui Du, Yuan Zhe Su, Jie He, Yi Pan Li, De Zhi Wu, Dao Heng Sun
• Keywords: MEMS Resonators, Precision Analysis, Quality Factor, Time Domain Measurement, Vacuum Level

References

[1] Christopher J. Welham, John Greenwood, Michael M. Bertioli. A high accuracy resonant pressure sensor by fusion bonding and trench etching. Sensors and Actuators 76 (1999) 298–304.

DOI: 10.1016/s0924-4247(99)00065-5

[2] RenWang, Peng Cheng, Fei Xie, etc. A multiple-beam tuning-fork gyroscope with high quality factors. Sensors and Actuators A 166 (2011) 22–33.

DOI: 10.1016/j.sna.2010.12.024

[3] Umar Asif and Javaid Iqbal. Motion Planning Using an Impact-Based Hybrid Control for Trajectory Generation in Adaptive Walking. Int J Adv Robotic Sy, 8 (2011) 212-224.

DOI: 10.5772/45701

[4] Dawei Zhang, Zhenbo Li, Mao Ling and Jiapin Chen. A Mobile Self-reconfigurable Microrobot with Power and Communication Relays. Int J Adv Robotic Sy, 7 (2010) 51-60.

[5] K. Okazaki, T. Ogiwara, M. Takato, A. Iiduka, S. Takahama, M. Fujiwara, K. Saito, and F. Uchikoba. MEMS Micro Robot Using Mosfet Based Pulse-Type Hardware Neural Networks for Motion Control. 2012 IEEE, (2012) 1165-1168.

DOI: 10.1109/memsys.2012.6170370

[6] M. Dienel, M. Naumann, A Sorger, etc. On the influence of vacuum on the design and characterization of MEMS. Vacuum, 86 (2012) 536-546.

DOI: 10.1016/j.vacuum.2011.10.005

[7] T. Corman, K. Norén, P. Enoksson, etc. Burst, Technology with Feedback-Loop Control for Capacitive Detection and Electrostatic Excitation of Resonant Silicon Sensors. IEEE transactions on electron devices. 11, 47 (2000) 2228-2235.

DOI: 10.1109/16.877188

[8] A. A. Trusov, A. R. Schofield, A. M Shkel. A substrate energy dissipation mechanism in in-phase and anti-phase micro-machined z-axis vibratory gyroscopes. Journal of Micro-mechanics and Microengineering, 18 (2008).

DOI: 10.1088/0960-1317/18/9/095016

[9] Jong-Seok Kim, Sang-Woo Lee, Kyu-Dong Jung and etc. Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method. Microelectronics Reliability, 48 (2008) 948-952.

DOI: 10.1016/j.microrel.2008.03.001

[10] A. A. Trusov, A. R. Schofield, A. M Shkel. Gyroscope architecture with structurally forced anti-phase drive-mode and linearly coupled anti-phase sense-mode. IEEE, M4F. 001, (2009) 660-663.

DOI: 10.1109/sensor.2009.5285411

[11] A. A. Trusov, A. R. Schofield, A. M Shkel. Study of Substrate Energy Dissipation Mechanism in in-Phase and Anti-Phase Micromachined Vibratory Gyroscopes. IEEE Sensors 2008 Conference, (2008) 168-171.

DOI: 10.1109/icsens.2008.4716410

[12] M. Zhang, N. Llaser and F. Rodes. High-Precision Time-Domain Measurement of Quality Factor. IEEE transactions on instrumentation and measurement, 61 (2012) 842-844.

DOI: 10.1109/tim.2011.2172998

[13] K. f. Zeng, M. Paulose, K. G. Ong, etc. Frequency-domain characterization of magnetoelastic sensors: a microcontroller-based instrument for spectrum analysis using a threshold-crossing counting technique. Sensors and Actuators A, 121 (2005).

DOI: 10.1016/j.sna.2004.11.039

[14] Zhang L.L., Che L.F., Li Y.F., etc. Study on the Testing Method for the Quality Factor of Capacitive Accelerometer Based on Step Response. Chinese Journal of Sensors and Actuators, 22 (2009) 1417-1420.

[15] Wang l. y., Liu y. f. and Sun d. h. The Preliminary Study of Micromachined Tunneling Gyroscope with a Fan-shaped Comb Drive Electrode. Journal of Xiamen University, 45 (2006) 355-359.

[16] Meng G., Zhang W. M. MEMS dynamics, Science Press, Beijing, (2008).