Acoustic Noise Energy Scavenger with Noise Reduction Effect

Shao Hua Wu; Li Dong Du; Hao Yue Ping; Li Jun Guo; Zhan Zhao; De Yi Kong; Zhen Fang

doi:10.4028/www.scientific.net/KEM.609-610.1339

Paper Titles

Research of Optical Characteristics of Diffuser with Taper Microstructure by Micro Injection Molding
p.1313

Study on Measuring System of Automatic Image Alignment Refractive Index Based on New Mathematical Model
p.1319

The Precision Observation of Projection Model for Microgripper System Based on Stereo Light Microscope
p.1324

Research of the PZT Polarization for Deformable Mirror
p.1331

Acoustic Noise Energy Scavenger with Noise Reduction Effect
p.1339

The Influence of Electrodes Position to Alternating Current Annular Micromixer
p.1343

Design and Research of Dynamical Property Testing System for Nano and Micron Inertial Components
p.1349

Kinematic Analysis of Ultrasonic Vibration Assisted Micro End Grinding
p.1357

Artifacts in KPFM in FM, AM and Heterodyne AM Modes
p.1362

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Acoustic Noise Energy Scavenger with Noise Reduction Effect

Abstract:

A kind of novel acoustic noise energy scavenger with additional function of noise reduction is introduced in this article. The device consists of energy harvesting membranes and silicon micro perforated panel (MPP) resonant structure. Both of them are all fabricated with silicon wafer in use of MEMS technology. The maximum output power of the energy scavenger is about 14.1μW/m², the maximum open circuit voltage achieves 69.41mV, and the average noise absorption coefficient of the device is higher than 0.7 in the bandwidth of 1500Hz to 6000Hz. The energy collected by the device could be used for driving micro and nano electronic systems.