Research of the PZT Polarization for Deformable Mirror

Jun Jie Chen; Ying Liu; Jian Qiang Ma; Ji Cong Deng; Bao Qing Li; Jia Ru Chu

doi:10.4028/www.scientific.net/KEM.609-610.1331

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 609-610Research of the PZT Polarization for Deformable...

Research of the PZT Polarization for Deformable Mirror

Abstract:

This paper demonstrates that the deformation of the piezoelectric deformable mirror (DM) is proportional to the transverse piezoelectric coefficient of the lead zirconate titanate (PZT) by the theoretical analysis. The optimal polarization conditions were obtained by experiments to optimize the performance of the DM. After the optimal polarization, the transverse piezoelectric coefficient of the PZT film increases from 350 pm/V to 431 pm/V, which will improve the deformation of the DM.

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Periodical:

Key Engineering Materials (Volumes 609-610)

Pages:

1331-1335

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.609-610.1331

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Online since:

April 2014

Authors:

Jun Jie Chen, Ying Liu, Jian Qiang Ma, Ji Cong Deng, Bao Qing Li*, Jia Ru Chu

Keywords:

Deformable Mirror, Polarization, PZT

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* - Corresponding Author

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