Study on Shock Resistance of MEMS Devices with Different Stoppers

Abstract:

The shock resistance of the MEMS device can be improved by simplifying its structure, but it will reduce accuracy. A commonly implemented solution that strengthens the shock resistance is the use of stopper. However, the collision between MEMS structure and stopper in shock environment may lead to the failure of the device. Hence, stopper should have a fine protection performance. In this study, the design method and principle of the MEMS device in the shock environment were analyzed. It was pointed out that the reliability design methodology of the MEMS device based on statics theory was insufficient. Next, the response of MEMS device to shock was studied and the shock dynamics model was established. Based on the model, the shock response of the traditional design and designs with different stoppers were analyzed. At last, experiments were carried out and the protection performance of different stoppers was evaluated. Results show that the use of stopper can obviously improve the shock resistance of the device. Elastic stopper can strengthen the shock resistance of the device greatly because of the excellent protection ability, while hard stopper may cause the emergence of the sharp stress wave.

• Periodical: Key Engineering Materials (Volumes 609-610)
• Pages: 825-830
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.609-610.825
• Online since: April 2014
• Authors: Tao Jiang*, Yun Wei, Sai Yao, Jian Zhou
• Keywords: Collision, Contact Stress, MEMS, Shock Resistance, Stopper

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