Corner Effect of Micro-Comb Capacitive Structure

Abstract:

The comb-shaped capacitive micro-machined gyroscope employing an electrostatic comb drive and capacitive sensing structure is a typical type of MEMS sensor. Because of design and processing limitation and other factors, there are problems related to parallelism, dimensional accuracy and shape accuracy of the fabricated comb capacitor. These problems induce error into the calculation of the capacitance of the comb capacitor. The capacitance of the comb capacitor can be better calculated by the modeling the corner effect with various equipotential lines.

• Periodical: Key Engineering Materials (Volumes 609-610)
• Pages: 831-836
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.609-610.831
• Online since: April 2014
• Authors: Hai Peng Liu, Shi Qiao Gao, Lei Jin, Yun Li He
• Keywords: Comb Capacitor, Coner Effect, Micro-Machined Gyroscope

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