The Influence and Control of Encapsulation Moisture in MEMS Gyroscope

Abstract:

MEMS gyroscope can be used in various field such as stabilization, controlling and guiding, navigation and so on. Bias variation over temperature is the key performance in MEMS gyroscope. The encapsulation moisture has great influence on the bias variation of MEMS gyroscope.By experiments on gas recharged, roast temperature, die attach adhesive and encapsulation shell, method to depress the encapsulation moisture is obtained. By DPA, the encapsulation moisture of sensing element encapsulated by the reformative method can be reduced to less than 1000 ppm, and the performance on temperature of MEMS gyroscope is improved.

• Periodical: Key Engineering Materials (Volumes 609-610)
• Pages: 875-878
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.609-610.875
• Online since: April 2014
• Authors: Ya Bei Guo*, Hui Yu, Wen Yi Lu, Xiao Feng Jin, Jiang Bo Zou
• Keywords: Encapsulation, MEMS Gyroscope, Moisture, Shell

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