A High-Resolution Lowpass Sigma-Delta Modulator Applied in Micro-Gyroscope

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Abstract:

In this paper, in order to enhance resolution and guarantee the stability of the micro-gyroscope, a high-resolution lowpass sigma-delta modulator is proposed. It employs single-loop fourth-order and full differential structure. The simulated result on the Simulink platform shows that the SNDR is 105.4dB and the effective number of bits (ENOB) is 17.22bits. The entire circuits are implemented with 0.5μm CMOS process. The simulated result on Cadence shows that the SNDR is 99.7dB. The modulator operates at a sampling frequency of 25.6MHz and the signal bandwidth is 100kHz with 128 oversampling ratio (OSR). The dynamic range (DR) is 120 dB approximately and the SNDR changes linearly with the input level.

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Key Engineering Materials (Volumes 609-610)

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964-967

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April 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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[1] R. Maimon, O. Lahav, Y. Gerson, O. Zohar, H. Berko, S. Krylov, Tactical grade micro gyroscope with dual capcitive/optical sensing, in Proc. IEEE Int. Micro Electro Mechanical Systems (MEMS) Conf [C], 2013, 637-640.

DOI: 10.1109/memsys.2013.6474322

Google Scholar

[2] R. J. Pryputniewicz, T. F. Marinis, J. W. Soucy, C. Furlong, Development of packaging for MEMS inertial sensors, in Proc. Position Location and Navigation Symp. PLANS 2004 [C], 2004, 56-62.

DOI: 10.1109/plans.2004.1308974

Google Scholar

[3] A. A. Aziz, A. H. Sharaf, M. Serry, S. Sedky, Novel architecture for inertial grade SOI MEMS inertial sensors, in Proc. IEEE Int. SOI Conf [C], 2009, 1-2.

DOI: 10.1109/soi.2009.5318765

Google Scholar

[4] S. Rombach, T. Northemann, M. Maurer, M. Dienger, Y. Manoli, Modulated electro-mechanical continuous-time lowpass sigma-delta-modulator for micromachined gyroscopes, in Proc. Int. Solid-State Sensors, Actuators and Microsystems Conf. TRANSDUCERS 2011 [C], 2011, 1092-1095.

DOI: 10.1109/transducers.2011.5969183

Google Scholar

[5] Liu X W, Xu H L. An improved fourth-order band-pass sigma-delta modulator with a novel resonator. Optoelectronics and Microelectronics (ICOM), 2012 International Conference on. Piscataway: IEEE, 2012. 510-513.

DOI: 10.1109/icoom.2012.6316327

Google Scholar