Study on MEMS Capacitive Differential Pressure Sensor

Abstract:

The design and fabrication of MEMS capacitive differential pressure sensor is reported. Silicon membrane is used as movable electrode. Gold metal film on glass is used as fixed electrode. Anodic bonding is used to bond together the silicon and glass to form the capacitive pressure sensor. The measurement capacitance of the sensors is 5.37 pF at an applied pressure of 0 kPa and 7.26 pF and the full operating range of 40 kPa.The ratio of changed to initial capacitance was 0.35. The error of the MEMS capacitive pressure sensor is less than 4‰ full-scale(FS) by using quadratic curve fitting which can meet most application requirements.

• Periodical: Key Engineering Materials (Volumes 609-610)
• Pages: 968-971
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.609-610.968
• Online since: April 2014
• Authors: Zhi Hao Hou*, Zhen Huang, Shi Xing Jia
• Keywords: Capacitive Sensor, MEMS, Pressure Sensor

References

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DOI: 10.1016/j.sna.2006.09.022