Reproducibility of a Nanometre Accurate Moving-Scale Measurement System

Niels Bosmans; Jun Qian; Dominiek Reynaerts

doi:10.4028/www.scientific.net/KEM.613.37

Paper Titles

Revision of the SI: The Determination of the Avogadro Constant as the Base for the Kilogram
p.3

Characterizing the New Sphere Interferometer for the Diameter Determination of the Avogadro Spheres
p.11

New Avogadro Spheres for the Redefinition of the Kilogram
p.17

Recommendations for Unified Rules for Key Comparison Evaluation
p.26

Reproducibility of a Nanometre Accurate Moving-Scale Measurement System
p.37

Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement System
p.43

Highly-Stable Electronic Sensor Interface for Capacitive Position Measurement
p.51

Model and Measurement Method of Optical Nonlinearities Caused by the Heterodyne and Homodyne Interference Terms in the Heterodyne Interferometer
p.58

Orthogonality Measurement of Cross-Grating Based on Image Processing of Multi-Order Diffraction Patterns
p.64

HomeKey Engineering MaterialsKey Engineering Materials Vol. 613Reproducibility of a Nanometre Accurate...

Reproducibility of a Nanometre Accurate Moving-Scale Measurement System

Abstract:

A dedicated experimental setup has been designed and built up for determining the reproducibility of a 1-DOF moving-scale measurement system. A 3-DOF moving-scale system would enable the measurement of the position of a workpiece table moving in three perpendicular directions with minimized Abbe-offset. This allows normal machine tools and CMMs to match or even surpass the accuracy of ultra-precision machines. An uncertainty budget indicates that the 1-DOF moving-scale system can obtain a measurement uncertainty of 18 nm. Thermal drift is the largest contribution to the measurement uncertainty and should be accurately determined.

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Periodical:

Key Engineering Materials (Volume 613)

Pages:

37-42

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.613.37

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Online since:

May 2014

Authors:

Niels Bosmans*, Jun Qian, Dominiek Reynaerts

Keywords:

Abbe Principle, Linear Scales, Metrology, Thermal Stability

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* - Corresponding Author

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