Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement System

Abstract:

To improve the measurement accuracy of two-dimensional (2D) precision working stages in the semiconductor manufacturing industry, an error separation and dynamic compensation method based on a planar grating is proposed for a 2D coplanar displacement measurement system. In the system, a planar grating of HEIDENHAIN PP281R is fixed in the center of precision working stage to build coplanar structure and reduce Abbe errors. And the system errors including grating period carved error, temperature effect, vibration effect and mount effect are modeled, calculated and separated. Then the separated errors are dynamically compensated from the corresponding displacement measurement results through data-processing software. Analysis results show that the proposed error separation and dynamic compensation method based on planar grating can improve the measurement accuracy of the coplanar displacement measurement system effectively.

• Periodical: Key Engineering Materials (Volume 613)
• Pages: 43-50
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.613.43
• Online since: May 2014
• Authors: Yong Meng Liu*, Mao Qiang Yuan, Jie Ru Cao, Jing Ma, Jiu Bin Tan
• Keywords: Displacement Measurement, Dynamic Correction, Error Separation, Planar Grating, Two-Dimensional Working Stage

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