Research on a Long Travel Nanopositioning Air Bearing Stage with the Linear Motors

Abstract:

The objective of this research is to develop a PC-based closed-loop nanopositioning system using the dual-frame two-axis drive single mobile independent framework. The stage body was supported by an air bearing on a granite base to reduce the frictional force. The developed stage was driven by the PC-Based interface of ANCA 5DX CNC controller, for the precision motion control of the linear motors. The laser scales were used as the feedback sensors so that the closed loop control of the developed system was possible. Based on the test results, the designed closed loop nanopositioning system was capable of precision positioning within the travel of 100 mm along X-axis and Y-axis. The Z-direction stage stability of the developed system was 20 nm, the maximum yaw error of the stage moving along X-axis was about 3.77 arc-seconds, and the maximum pitch error of the stage moving along Y-axis was about 1.04 arc-seconds, based on the test results. By utilizing the PC-Based interface of ANCA 5DX CNC controller based closed-loop PID control system, the positioning capability of X-axis and Y-axis was about 20 nm. Performing the circular test with radius of 20 mm, the deviation of circular positioning test was about 223 nm. Based on the tracing speed test results, the standard deviation along X-axis and Y-axis was 5 nm under tracing speed of 0.05 mm/min.

• Periodical: Key Engineering Materials (Volume 613)
• Pages: 70-77
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.613.70
• Online since: May 2014
• Authors: Fang Jung Shiou*, Chao Jung Chen, Wen Sheng Chien, Huay Chung Liou
• Keywords: Air Bearing, ANCA Controller, Linear Motors, Nanopositioning Stage, PID Control

References

[1] Information on http: /www. physikinstrumente. com/en/products/nanopositioning/nanopositioning_multi-axis_selection. php.

[2] H. Yau and J. Yan, Adaptive sliding mode control of a high-precision ball-screw-driven stage, Nonlinear Analysis: Real World Applications, 10 (3) (2009) 1480-1489.

DOI: 10.1016/j.nonrwa.2008.01.025

[3] C. Chu and S. Fan, A novel long-travel piezoelectric-driven linear nano-positioning stage, Precision Engineering, 30 (2006) 85-95.

DOI: 10.1016/j.precisioneng.2005.05.002

[4] F. Shiou, K. Fan, K. Pan, and Z. Ke, Development of a meso-scale machine tool and the preliminary cutting tests of oxygen-free copper using a polycrystalline diamond tool, Computer-Aided Design and Applications, 9(5) (2012) 631-640.

DOI: 10.3722/cadaps.2012.631-640

[5] P. Sriyotha, K. Nakamoto, M. Sugai and K. Yamazki, Development of 5-Axis Linear Motor Driven Super-Precision Machine, Precision Engineering, 55 (2006) 381-384.

DOI: 10.1016/s0007-8506(07)60440-5

[6] W. Gao, Y. Arai, A. Shibuya, S. Kiyono, and C. Park, Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage, Precision Engineering, 30 (2005) 96-104.

DOI: 10.1016/j.precisioneng.2005.06.003

[7] M. Stephens, C. Manzie, and M. Good, Control-oriented modeling requirements of a direct-drive machine tool axis, Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME, 134(5) (2012) 054503.

DOI: 10.1115/1.4006216

[8] Information on http: /www. ibspe. com/public/uploads/content/files/ibs_airbearings_uk. pdf.

[9] Information on http: /www. ancamotion. com/Products/Controls/CNC/FP-CNC.

[10] Information on http: /www. kollmorgen. com/en-us/products/motors/direct-drive/direct-drive-linear.

[11] W. Chien, Research on the accurate positioning of a long travel air-bearing nano-positioning stage using the linear motors, Master thesis (in Chinese), National Taiwan University of Science and Technology, Taiwan, (2011).