Measurement on the Mechanical Properties of SiC Thin Films Based on Square Thin Films Theory

Yao Min Chen; Pei Tao Dong; Xue Zhong Wu; Yu Lie Wu

doi:10.4028/www.scientific.net/KEM.645-646.287

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 645-646Measurement on the Mechanical Properties of SiC...

Measurement on the Mechanical Properties of SiC Thin Films Based on Square Thin Films Theory

Abstract:

SiC films made of different methods may have different mechanical properties, so their mechanical properties need to be determined by mechanical property measurement [1]. Since SiC films have stable chemical properties, it’s very difficult to be etched [2]. This paper introduce a method for SiC films mechanical property testing without processing SiC. Moreover, in view of the lack of square SiC films’ mechanical properties research, this paper also do simulation on it.

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Periodical:

Key Engineering Materials (Volumes 645-646)

Pages:

287-290

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.645-646.287

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Online since:

May 2015

Authors:

Yao Min Chen*, Pei Tao Dong, Xue Zhong Wu, Yu Lie Wu

Keywords:

AFM, Mechanical Property, Silicon Carbide (SiC), Square Thin Films

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* - Corresponding Author

References

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DOI: 10.1116/1.2789446

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