A New Design of a Piezoelectric Triaxial Micro-Accelerometer

Abstract:

Accelerometer in MEMS always is made by capacitive or piezoresistive, whose dynamic response is not good, the operating frequency is narrow, and the cross-axis sensitivity is low. A new type of piezoelectric micro-accelerometer is designed, and its structure is “x” type. The sensing unit is piezoelectric PZT films, which is achieved by sol-gel method. The accelerometer is a triaxial accelerometer. The theoretical and simulation analysis is used to achieve the charge sensitivity and response frequency, and also get the optimal structural parameters. A new circuit connection is proposed to improve the sensitivity and avoid the cross-axis sensitivity. The design achieves the z-axis sensitivity with more than 40 pC/g, x, y-axis sensitivity with more than 8pC/g, and the response frequency is about 3000Hz.

• Periodical: Key Engineering Materials (Volumes 645-646)
• Pages: 841-846
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.645-646.841
• Online since: May 2015
• Authors: Jian Yan Wang, Ting Ting Wang, Hang Guo*
• Keywords: Accelerometer, Circuit Connection, Simulation, Theotetical Analysis

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