A Variable Resistor Micro System Based on Electro-Explosion

Xu Ran Ding; Ya Bin Wang; Wen Zhong Lou; Yun Long Guo

doi:10.4028/www.scientific.net/KEM.645-646.865

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 645-646A Variable Resistor Micro System Based on...

A Variable Resistor Micro System Based on Electro-Explosion

Abstract:

A novel type of variable resistor micro system based on electro-explosion is described and its performance test results are presented. The variable resistor consists of four metallic leads in parallel with different width and length thus different resistances and four one-time shot MEMS solid on-off switches. By killing off the metallic lines, the variable resistor varies its resistance. Switching is accomplished by a voltage pulse. The resistor can be driven by external signal and its predicted lifetime is very long. Besides, the resistor has no movable parts, therefore the resistor can be used for long term store systems and harsh environments.

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Periodical:

Key Engineering Materials (Volumes 645-646)

Pages:

865-868

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.645-646.865

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Online since:

May 2015

Authors:

Xu Ran Ding*, Ya Bin Wang, Wen Zhong Lou, Yun Long Guo

Keywords:

MEMS, Metal Bridge, Micro/Nanosystems, Variable Resistor

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* - Corresponding Author

References

[1] J.C. Chiou, L.C. Chou, Y.L. Lai, S.C. Huang, A novel thermal switch and variable capacitance implement by CMOS MEMS process approaching in micro electrostatic converter, Solid-State Electronics, v77(2012), pp.56-63.

DOI: 10.1016/j.sse.2012.05.014

Google Scholar

[2] Y. Zhao, W.Z. Lou, D.G. Li, Study of a novel bi-stable and easy integrated MEMS ETBS, 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012), Kyoto, Japan, pp.257-60.

DOI: 10.1109/nems.2012.6196769

Google Scholar

[3] Y. Zhao, D.G. Li, W.Z. Lou, L.F. Zhang, J.H. Li, M.B. Fang, Study of a MEMS short-circuit fuse based on electro-thermal theory, Key Engineering Materials, v503(2012), pp.277-283.

DOI: 10.4028/www.scientific.net/kem.503.277

Google Scholar

[4] Y. Zhao, W.Z. Lou, D.G. Li, Research in a novel integrated chip of safe and initiation control, Technical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012, pp.247-250.

Google Scholar